Confocal Microscopy

  • Equipment: Nanofocus µsurf custom
  • Standards: DIN EN ISO 25178 (3D-Surface characterization)
  • Fields of view: 320 x 320 µm to 3,2 x 3,2 mm
  • Camera resolution: 1 Megapixel
  • 3-colour-LED light source (RGB)
  • Max. mass of measuring object: 5 kg
  • Stitching: Scanning of large surfaces by stitching several single scans together as one
  • Evaluation software: Mountains Map 6


Possible applications

  • 3D-shape and profile measurements
  • 3D-Surface characterization/Roughness measurement
  • Measurement of structures in all three spatial directions
  • Capturing and statistical evaluation of scratches, wear traces, surface defects etc.


Scan of abrasion traces in a fine gold layer (Pin-on-disc-Tribometer, d = 2 mm), composed of 16 single scans by the method of stitching

Contact Person

Dipl.-Ing. (FH) Martin Balzer | Ext. 401