Plasma Surface Technology · Materials Physics

We develop new layer systems for decorative and functional applications and examine physical and chemical material properties

The department is engaged in vacuum-based depositions, in surface modifications and the characterization of materials with respect to the physical and chemical properties. The thin film deposition and surface modification is carried out using PVD (Physical Vapor Deposition) and PACVD (Plasma-Assisted Chemical Vapor Deposition) processes. These methods offer a wide range of possibilities for the modification of deposition parameters and for the coating of various materials (steels, hard metals, metals, plastics, ceramics, glass, textiles). Substrates and components can be coated stationary, with single or double rotation as well as roll-to-roll (R2R). Applications range from wear and corrosion protection to decorative applications, biocompatible coatings and energy technology (fuel cells).

Research and Development

  • PVD and PACVD layer development
  • Plasma nitriding
  • Wear and corrosion protection
  • Decorative hard coatings
  • Biomedical/biocompatible coatings
  • Energy technology (fuel cell)


  • Roughness and profile measurements 2D INFO | 3D INFO
  • Film thickness measurements INFO
  • Tribological examinations INFO
  • Microhardness tests INFO
  • Microstructure analysis
  • X-ray diffractometry and X-ray reflectometry INFO

Current Research Projects

The transfer of knowledge from research to industrial practice is all the more successful the earlier we cooperate with SMEs and large companies in our R&D work. This is why we are always on the lookout for companies to join the Project Support Committees (PA) of our new and ongoing IGF projects. If you are interested, please contact the respective contact person directly or use the contact form.

NEW: Flexible lithium-ion cells with microstructured current collectors to increase flexibility, adhesion and volumetric energy density Summary (German)

Development of a PACVD method relevant for production to deposit electrically conducting a-C:H:N protective coatings with high rate for PEM fuel cells  Research Project

Improving the corrosion and wear resistance of hard material-coated components by modifying electrical and mechanical properties  Summary (German)

Development of PVD coatings based on titanium/zinc and titanium/silver on textile fabrics Research Project

Development of conductive carbon-based protective coatings using established and novel coating processes for metallic bipolar plates of PEM fuel cells Summary



Dr. Martin Fenker
Head of Department
+49 7171 1006-400
Dipl.-Ing. (FH) Herbert Kappl
Deputy Head of Department
+49 7171 1006-403

Equipment and Procedures

  • X-ray diffraction (XRD, XRR)
  • Confocal microscopy INFO
  • Rockwell adhesion
  • Colorimetry INFO
  • Corrosion tests
  • Electrical and magnetical measurements